… and development of silicon piezoresistive pressure sensors. … determined the piezoresistive
coefficients by measuring the … piezoresistive effect and therefore the sensitivity of the sensor. …

… the piezoresistive effect in poly-Si can reach 60-70% of that … -Si sensing elements are based
on the processes developed … changes due to the piezoresistive effect are measured using a …

… strain to probe and measure deformation of surfaces and solids. The piezoresistive devices
can be simple … are isotropic in planes perpendicular to the growth direction [9]. The combined …

… in that the former measure point stresses while the latter mea… understanding of the
piezoresistance effect is based on the … very large numbers of devices, the development of the …

… piezoresistive effect is the change in resistivity of a material resulting from an applied loading.
This effect in silicon material … the thermal effect will influence the measurement result of a …

… a sensor rosette on (100) silicon can at best measure four of … exists for developing a sensor
rosette that can measure the … utilizing the transverse and shear piezoresistance effects,” J. …

… film solar cells. The resistivity of intrinsic a-Si:H and μ-Si:H as well as that of n-type a-Si:H
and μ-Si:H decreases with increasing tensile strain whereas it is increasing for both p-type …

… The piezoresistive effect of the top silicon layer of the SOI wafer is … The manufactured sensors
are measured with an applied pressure from 0 to … on oxide isolation was developed. The …

… Silicon piezoresistive devices evolved from bonded single … pseudoHall effect is based on
the shear piezoresistive effect, … on piezoresistive pressure sensors, which typically measure …

… into the piezoresistive effect in polycrystalline silicon is … model developed. Transport
across the grain boundary is … Hall devices being used for the segregation measurements. All …