Gorbachuk M. RESEARCH OF PIEZORESISTIVE EFFECT IN SILICON FILMS AND DEVELOPMENT OF MEASURING TRANSDUCERS BASED ON THEM. ges [Internet]. 2023 Oct. 30 [cited 2024 Jul. 5];1(sge23-01):97-103. Available from: https://desymp.promonograph.org/index.php/sge/article/view/sge23-01-017